RoHS

Yes

CE

No

Guide

-

Attention

▶Micrometer brackets may extend above the top surface of some stages. Check drawings for detailed information.

▶Note that based upon payload size, rated travel could be reduced.

Stage Size

100×100 mm

Axes of Travel

X axis

Micrometer Readable Resolution

0.01 mm

Micrometer Position

Center

Moment Stiffness / Pitch

0.09″/N・cm

Moment Stiffness / Yaw

-

Moment Stiffness / Roll

0.07″/N・cm

Guide Method

Crossed roller

Travel Accuracy / Pitch

25″

Travel Accuracy / Yaw

15″

Travel Accuracy / Straightness

2.0 μm

Running Parallelism

15 μm

Travel

±12.5 mm

Lead of Actuator

0.5 mm

Max. Moment Capacity / Pitch

27.5 N・m

Max. Moment Capacity / Yaw

30.9 N・m

Max. Moment Capacity / Roll

40.7 N・m

Weight

0.9 kg

Primary material

Aluminum

Load Capacity

490 N ( 50.0 kgf )

Finish

Black anodized

Parallelism

50 μm